Post-deposition annealing effects in RF reactive magnetron sputtered indium tin oxide thin films

  1. Martínez, M.A.
  2. Herrero, J.
  3. Gutiérrez, M.T.
Journal:
Solar Energy Materials and Solar Cells

ISSN: 0927-0248

Year of publication: 1992

Volume: 26

Issue: 4

Pages: 309-321

Type: Article

DOI: 10.1016/0927-0248(92)90050-Y GOOGLE SCHOLAR

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