Post-deposition annealing effects in RF reactive magnetron sputtered indium tin oxide thin films
- Martínez, M.A.
- Herrero, J.
- Gutiérrez, M.T.
ISSN: 0927-0248
Year of publication: 1992
Volume: 26
Issue: 4
Pages: 309-321
Type: Article
ISSN: 0927-0248
Year of publication: 1992
Volume: 26
Issue: 4
Pages: 309-321
Type: Article