Influence of DBD Inlet Geometry on the Homogeneity of Plasma-Polymerized Acrylic Acid Films: The Use of a Microplasma-Electrode Inlet Configuration

  1. Cools, P. 3
  2. Sainz-García, E. 1
  3. Geyter, N.D. 3
  4. Nikiforov, A. 3
  5. Blajan, M. 2
  6. Shimizu, K. 22
  7. Alba-Elías, F. 1
  8. Leys, C. 3
  9. Morent, R. 3
  1. 1 Universidad de La Rioja
    info

    Universidad de La Rioja

    Logroño, España

    ROR https://ror.org/0553yr311

  2. 2 Shizuoka University
    info

    Shizuoka University

    Shizuoka, Japón

    ROR https://ror.org/01w6wtk13

  3. 3 Ghent University
    info

    Ghent University

    Gante, Bélgica

    ROR https://ror.org/00cv9y106

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Revista:
Plasma Processes and Polymers

ISSN: 1612-8850

Ano de publicación: 2015

Volume: 12

Número: 10

Páxinas: 1153-1163

Tipo: Artigo

DOI: 10.1002/PPAP.201500007 SCOPUS: 2-s2.0-84945264179 WoS: WOS:000363731700012 GOOGLE SCHOLAR

Outras publicacións en: Plasma Processes and Polymers

Repositorio institucional: lock_openAcceso aberto Editor

Resumo

Multiple vapor inlet systems have been developed to enhance the homogeneity of deposited polyacrylic acid films via medium and atmospheric pressure plasma technology. Different inlet systems were experimentally tested and optical reflectance spectrometry (OPS) was used to measure the differences in thickness of the films along the exposed surface. Standard deviations of more than 65% were reduced to less than 10%. COMSOL models point to the gas flow as the main contributor to the film homogeneity. OPS analysis of the best set-up shows a linear relationship between thickness and exposure time (100-200 nm/min). XPS C1s deconvolution indicates a preservation of +50% of the -COOH groups and a significant incorporation of other oxygen containing groups. © 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.